Bayan
STACIS IIIc ye fasal compact ye STACIS III** active vibration isolation system ye. A bɛ kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye.
STACIS IIIc ee kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye
Ha tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë Në tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë N'a sɔrɔ kunnafoniw wɛɛngɛ, tɩŋ specifications dɔɔni.

STACIS IIIC nafa
Ka tɛmɛ STACIS III, a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl a cɔl
STACIS ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r A tɛ̈n "soft" suspension, ye tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n
Dizayn ye kɔc cï gam ku teknoloji ye kɔc cï gam ye kɔc cï gam ye kɔc cï gam ye kɔc cï gam ye kɔc cï gam
A lëu bï ya looi në bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active bandwidth ye cɔl active
Kuen

4500 lbs (2045 kg) payload tested with simulated vibration at VC-C
(500 μin./s, 12.5 μm/s RMS)
Performance Specifications
Specifications
Freedom aktif | 6 |
Bandwidth aktif | 0.6 Hz - 150 Hz |
Frequency ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan | 18 Hz Vertical ku Horizontal |
Active resonance frequency | 0.5 Hz |
1 Hz ye cɔl vibration | 40% - 70% |
≥2 Hz | ≥90% |
10 lbs (4.5 kg) ye tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n (Dɔɔr 10:1) |
0.3 sekond |
Gɛɛl kɔnɔ | <0.1 nm RMSd> |
Kuen de luɔi de isolator tök | A lëu bɛ̈n ya tɔ̈ɔ̈u: 400 - 1100 lbs (181 - 499 kg) Kɛnɛya: 900 - 2100 lbs (408 - 953 kg) A lëu bï kɛ̈ɛ̈r: 1900 - 4500 lbs (862 - 2041 kg) |
Kɔɔr (1000 lbs/454 kg mass, medium load capacity isolator) | 40,000 lbs/inch ((73 x 10)5beef/m) |
Magnetic field ye bɛ̈n looi në 4 inch (102 mm) de distance isolator** | <0.02 μG broadband RMSd> |
Design, size, environment and utility requirements of insulator, size, environment and utility requirements
Environment and Safety (Wɛɛl kɛnɛya kɛnɛya kɛnɛya kɛnɛya kɛnɛya kɛnɛya kɛnɛya kɛnɛya kɛnɛya) | Luɔi CE ku RoHS |
Active Vibration Isolator | ** Pneumatic actuator ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ Vertical actuator ye kony bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi bɛ̈n looi |
Passive vibration isolation components | Single hard polygonal homogeneous elastomer (no compressed air source) |
Sensor Vibration ye | Inertial sensor ye cɔl seismic detector ye tɔ̈u piny, ye tɔ̈u piny vibration ye tɔ̈u piny, ye tɔ̈u piny vibration ye tɔ̈u piny, ye tɔ̈u piny vibration ye tɔ̈u piny, ye tɔ̈u piny vibration ye tɔ̈u piny |
Active feedback control loop | Kɔnɔŋ, luɔɔi, ku tiɲɛ tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n |
Isolator size (width x depth x height) | 14.45 x 14.26 x 6.16* in. 367 x 362 x 157* mm * Unloaded height. Loading may decrease height by up to 0.12 in. (3 mm). Systems with ≥4 isolators may require the addition of external wedge mounts that add 1.6 in. (41 mm) to the height. |
Isolator kilo | 53 kilo (24 kilo) |
Temperature de luɔi | 50° - 90° F 10° - 32° C |
Temperature ye tɔ̈ɔ̈u | -40° - 130° F -40° - 55° C |
Humidity | 30 - 60% |
System Power Requirements (System Power Requirements) | 100、120、230、240 VAC 50/60 Hz AC; <600 W Luɔi CE |
Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr Dɛɛr | <480 μin. (12 μm) below 10 Hzd> |
Nombre de isolateurs de chaque système | 3 ye |
Accessories lëu | Laminated stainless steel platform, frame, stand tube, flattening device, seismic resistant device, lifting cover |
DC-2020 Controller Specifications
Dɛɛr (dɛɛr x dɛɛr x dɛɛr) | 19 x 8.5 x 1.75 inch 483 x 216 x 45 mm |
Weight ye | 6.3 lbs (2.9 kg) |
Processor | 150/75 MHz dual core |
Sampling Rate (Sampling Rate) | 10 kHz |
Simulation output | 16 kanal |
Input analog | 16 kanal |
Lampu Status | LED tök |
Port panel ye nhial | 1 Serial USB 2.0 1 Serial Micro-USB 1 Ethernet RJ-45 2 BNC |
Port Panel bak | 1 Serial USB 2.0 1 Ethernet RJ-45 1 RS-232 DB-9 Traditional Serial ye luui në STACIS 2100 Traditional Isolator |
User Interface | LCD Display Character menu në super terminal GUI ye looi tënë Microsoft Windows Ethernet GUI cï gɔ̈t |
STACIS Users and Applications
1. Mikroelektronik, semikonduktor
▪ Kuen chip
▪ Teknoloji Microscopy
▪ Mask kalibration
2. Piööc ilmiah, nanoteknoloji
▪ SEM、TEM
▪ STEM、SPM
3, Laser
▪ Life Sciences, Pharmaceutical Research
4. Industri Application
▪ Processing Precision
Diŋö bï yïn Active System kuanycök?
▪ Ka tɛmɛ <1Hz ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ, ka tɛmɛ
▪ Kualitas, production
▪ Capabilities of imaging with smaller features (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging with smaller features) (Capabilities of imaging)
▪ Ilmuŋ
▪ A tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ ka tɛmɛ
▪ ** Solution ye SEM standard site installation parameters gam
▪ Lɔ̈k bɛ̈ɛ̈i kɔ̈k bɛ̈ɛ̈i kɔ̈k bɛ̈ɛ̈i kɔ̈k bɛ̈ɛ̈i kɔ̈k
Wɛ̈n bï sistem ye STACIS kuanycök
▪ A bɛ raan kimiya ye, a bɛ kɛnɛya min tɛ̈n yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen yen
▪ ** Low frequency isolation system ye kɔnɔ.
▪ Kɔc ye SEM looi aye kä wïc bɛ̈n looi, ku kä wïc bɛ̈n looi aye kä wïc bɛ̈n looi.
▪ STACIS** cï looi në run 1990 yiic, TMC acï bɛ̈n ya looi, ya looi ku ya tɔ̈ɔ̈u në tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈n yenë tɛ̈
STACIS ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔni ye dɔɔnikaam
Loktu de tɛmɛ ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈
Kä tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u tɔ̈u
▪ STACIS ye bandwidth ye cɔl active isolation ye 0.6Hz-150Hz
▪ 6 degrees of freedom active vibration elimination, vibration isolation 8-10dB at 1Hz
▪ Ka tɛmɛ 2-3Hz, ka tɛmɛ 90% (20dB)
Kulis kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ kɛnɛŋ
1, tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n
2. Ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u
▪ Luɔi puɔ̈ɔ̈c kɛnɛya
▪ Luɔi rapor kɛnɛya
▪ Ka tɛmɛ vibration, magnetic field, sonic wave detection, kuru solutions
▪ TMC ye kɔn kony bɛ̈ɛ̈i bɛ̈ɛ̈i bɛ̈ɛ̈i bɛ̈ɛ̈i bɛ̈ɛ̈i bɛ̈ɛ̈i
▪ 40+ years of industry experience, industry** Kuen ye kɔc looi në luɔɔi de luɔɔi de luɔɔi de luɔɔi de luɔɔi de luɔɔi de luɔɔi de luɔɔi de luɔɔi
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