Brand: GATAN

Model: Gatan SmartEMIC Electron Beam Induction Current Measurement System

Luɔi: GATAN

Raan ye ɣaac: Opodong Co., Ltd.

Product Introduction:

Kä ye looi:

EBIC analytical system, can real-time software control fully automatic collection of electron beam sensed current (EBIC) signals, get EBIC image information, and also can get IV curve information, zui can finally test PN node location, width, minor son diffusion length, material or device failure point positioning, widely used in electronic semiconductor fields.

Karakteristik sistem produk:

EBIC system ye baara kɛ nɛɛgɛ ye, ye EBIC measurement ye kɛ nɛɛgɛ ye. Software analytics ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan ye raan

SmartEBIC ye luui në SEM aye:

• EBIC amplifier ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta ye kɔmpiöta

• EBIC Sample Seat (ASH) ye kɛ tungsten probe ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r ye kɛ̈ɛ̈r. Gatan adapter dɔ̈ɔ̈ŋ alëu bï samples ya tɔ̈ɔ̈u në air lock*

• Interface kɛ SEM Sample Table

• Link socket ku 4 BNC-type cable link, low noise ye air feed, suitable for EBIC and electronic beam measurement

• DigiScan II digital electron beam control system ye Fireware technology looi. A naŋ analog input fila ye fotow ye fotow ye tɔ̈ɔ̈u në kaam tök, ku a lëu bï pixel ye tɔ̈ɔ̈u në kaam tök, waati ye yen tɔ̈ɔ̈u në kaam tök, ku rot ye scan ye tɔ̈ɔ̈u në kaam tök. Në SEM kɔ̈k yiic, a lëu ba SEM tɔ̈u në software yic.

• Digital Micrography software ye kɔc cɔl SmartEBIC application plugin ye kɔc cɔl quantitative measurement, linear contours real-time ku post-processing analysis

Parameters Technical ye looi:

SmartEBIC alëu bï käke EBIC ya tɔ̈ɔ̈u ku bï käke EBIC ya tɔ̈ɔ̈u:

Sistem de kontrol de scan:

1, 1, 2- wala 4-bit data acquisition bɛ̈n gäm kä juëc ye kek looi

2, 16 x 1 ha 8000 x 8000 pixel scan resolution

3, electronic beam stay time, adjustable between 0.5 milliseconds/pixel to 300 milliseconds/pixel

4, Automatic adjust image display size, so that EBIC experiment process becomes more convenient. 4, Automatic adjust image display size, so that EBIC experiment process becomes more convenient. 4, Automatic adjust image display size, so that EBIC experiment process becomes more convenient.

*5, Digi-Scan controller configured, real-time software control fully automatic collection, can be quantitative analysis of the signal when EBIC signals are collected, without additional post-processing. *5, Digi-Scan controller configured, real-time software control fully automatic collection, can be quantitative analysis of the signal when EBIC signals are collected, without additional post-processing required. *5

*6, a bɛ se ka EBIC image information yök, a bɛ se ka IV curve information yök.

Luɔi de noise:

1. EBIC ye kek looi

2. coxial winding method

3. Bateri ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi ye looi

4. Can change the gain of amplifier, optimize the signal noise ratio and bandwidth of data collection. Can change the gain of amplifier, optimize the signal noise ratio and bandwidth of data collection. Can change the gain of amplifier, optimize the signal noise ratio and bandwidth of data collection.

5. Two optional first-order RC filters, low pass or high pass filters

6. Low drift zoom mode

7. Ka tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n tɛ̈n

8. Kuen juëc ye foto looi. A kɔnɔna ne kɛ̈ɛ̈l ye kɛ̈ɛ̈l ye kɛ̈ɛ̈l ye kɛ̈ɛ̈l ye kɛ̈ɛ̈l ye kɛ̈ɛ̈l ye kɛ

9. Can be adapted to the Lock-in technology (the system is not provided, such a configuration system will not be quantitative analysis of EBIC signals) (A lëu bï ya looi në teknoloji ye cɔl Lock-in) (a lëu bï ya looi në teknoloji ye cɔl Lock-in)

Luɔi:

A tɛmɛ software. A ye +/-5V ye tɔ̈u në 12bit (1.22mV).

Otomatik:

Cɔl tɛ̈n yenë amplifier parameters ya tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u ka tɔ̈ɔ̈u

Aw bɛ se ka tɛmɛ amplifier offset/gain

Software:

Process One-Dimensional Diffusion Length Measurement

A wide range of face scanning/line scanning analysis tools, including mathematical analysis tools, filtering applications and more. A wide range of face scanning/line scanning analysis tools, including mathematical analysis tools, filtering applications and more.

Awowa juëc ye fotow nyuɔɔth, ka fara fotow ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ ye kɔnɔ

Programming languages bï yïn kony ba software ye yïn looi ya gɔ̈t

Kä ye luɔɔi:

Test PN node position, width, minor diffusion length metal materials

Lɔ̈ɔ̈i de kä ye kek looi wala kä ye kek looi

Testing bit error density of semiconductor materials (Testing bit error density of semiconductor materials)

IV Feature Testing

Application misal:

Application 1: Test PN node location, width, minor son diffusion length

Application 2: Kuen de kä ye kek looi wala kä ye kek looi

Brand: GATAN

Model: Gatan SmartEMIC Electron Beam Induction Current Measurement System

Luɔi: GATAN

Raan ye ɣaac: Opodong Co., Ltd.